Clemex Options

11. 3D Rendering & Measurements

Using the focus motor, the stage controller and the new Advanced Multi-Layer Grab, this new function renders 3D topography of a sample in as many as 256 layers. New measurements for 3D topographic images include Solid Volume, Void Volume, Z (Depth) Average, Minimum and
Maximum values.
Available in
  • PE

Statistic Results for Depth Measurements

3D Rendering of chip with Z (depth)
measurement along green line
Graph of Depth of chip along green line